MEMS & Nano technology

For the positioning of xy-stages for MEMS and nano technology, a Laser Doppler Scale (LDS) with multiple-pass optical arrangement can be used to achieve sub-nanometer resolution (Ap-1115 and Technical article #13). For more detailed description, and specifications click on the Technical brochure LDS-1000.

• LDS-1000 Precision Linear Positioning
• Ap1115-- A multiple-pass optical adapter for high resolution in turbulent environment
• Tech Article #13-- A linear actuator system with 1-angstrom closed -loop control resolution and 50-milimeter travel range